中圖分類號：TP212 文獻標志碼：A DOI: 10.16157/j.issn.0258-7998.223326 中文引用格式： 田寬，閆堉琦，孫雨安，等. 諧振微懸臂梁傳感器的工作原理及其在生化檢測中的研究進展[J]. 電子技術應用，2023，49(3)：11-20. 英文引用格式： Tian Kuan，Yan Yuqi，Sun Yu'an，et al. Principle of resonant micro-cantilever sensor and its research progress in biochemical detection[J]. Application of Electronic Technique，2023，49(3)：11-20.
Principle of resonant micro-cantilever sensor and its research progress in biochemical detection
(1.School of Materials and Chemical Engineering， Zhengzhou University of Light Industry， Zhengzhou 450002， China； 2.State Key Lab of Transducer Technology， Shanghai Institute of Microsystem and Information Technology， Chinese Academy of Sciences， Shanghai 200050， China)
Abstract： Resonant microcantilever is a mass-type sensor that transforms mass change into frequency-shift signals. Due to the advantages of high mass resolution, high sensitivity, low cost, easy integration and miniaturization, resonant microcantilevers have received extensive attention from researchers. In recent years, with the rapid development of MEMS (Micro-Electro-Mechanical Systems) technology, resonant micro-cantilever sensors have been widely used in mass and flow control, trace biomedical detection, gas or liquid molecular analysis and other broad application fields. Herein, the specific applications of resonant microcantilever sensors in environmental detection, biomedicine and other fields in recent years are reviewed, and the future development trends are prospected.
Key words : resonant sensor；micro-cantilever；MEMS；resonant frequency；environmental monitoring；biomedical science
